Theoretical and experimental investigations of the optical waveguiding properties of on-chip microfabricated capillaries

被引:17
作者
Grewe, M [1 ]
Grosse, A [1 ]
Fouckhardt, H [1 ]
机构
[1] Univ Kaiserslautern, D-67663 Kaiserslautern, Germany
来源
APPLIED PHYSICS B-LASERS AND OPTICS | 2000年 / 70卷 / 06期
关键词
D O I
10.1007/PL00021143
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An on-chip capillary system with potential applications in miniaturized analytical chemistry and spectroscopy setups has been microfabricated using photolithographic, etching, and aligned bonding techniques. The optical waveguiding properties of the capillary are investigated theoretically and experimentally. Chip insertion losses as low as 3 dB at 0.514 mu m wavelength have been measured for a 15-mm-long water-filed capillary waveguide with 63 mu m internal diameter.
引用
收藏
页码:839 / 847
页数:9
相关论文
共 26 条
[1]   LOSS CALCULATIONS FOR ANTIRESONANT WAVE-GUIDES [J].
ARCHAMBAULT, JL ;
BLACK, RJ ;
LACROIX, S ;
BURES, J .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1993, 11 (03) :416-423
[2]   ALIGNED WAFER BONDING - A KEY TO 3-DIMENSIONAL MICROSTRUCTURES [J].
BOWER, RW ;
ISMAIL, MS ;
FARRENS, SN .
JOURNAL OF ELECTRONIC MATERIALS, 1991, 20 (05) :383-387
[3]   Z-SHAPED FLOW CELL FOR UV-DETECTION IN CAPILLARY ELECTROPHORESIS [J].
CHERVET, JP ;
VANSOEST, REJ ;
URSEM, M .
JOURNAL OF CHROMATOGRAPHY, 1991, 543 (02) :439-449
[4]   HYPER-RAYLEIGH SCATTERING IN SOLUTION [J].
CLAYS, K ;
PERSOONS, A .
PHYSICAL REVIEW LETTERS, 1991, 66 (23) :2980-2983
[5]   INTEGRATED OPTICAL-DETECTION CELL-BASED ON BRAGG REFLECTING WAVE-GUIDES [J].
DELONGE, T ;
FOUCKHARDT, H .
JOURNAL OF CHROMATOGRAPHY A, 1995, 716 (1-2) :135-139
[6]  
DELONGE T, 1995, C P HPCE 95 WUERZB
[7]  
DELONGE T, 1995, C P PITTC 95 NEW ORL
[8]   OPTICAL-CONSTANTS OF WATER IN 200-NM TO 200-MUM WAVELENGTH REGION [J].
HALE, GM ;
QUERRY, MR .
APPLIED OPTICS, 1973, 12 (03) :555-563
[9]  
Ismail M. S., 1991, Journal of Micromechanics and Microengineering, V1, P231, DOI 10.1088/0960-1317/1/4/004
[10]   Spectral measurements of hyper-Rayleigh light scattering [J].
Kaatz, P ;
Shelton, DP .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (04) :1438-1444