A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

被引：185

作者：

Basset, P. ^{[1
]}

Galayko, D. ^{[2
]}

Paracha, A. Mahmood ^{[1
]}

Marty, F. ^{[1
]}

Dudka, A. ^{[2
]}

Bourouina, T. ^{[1
]}

机构：

[1] Univ Paris Est, ESYCOM Lab, ESIEE Paris, F-93162 Noisy Le Grand, France

[2] Univ Paris 06, Lab LIP6, F-75252 Paris, France

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2009年 / 19卷 / 11期

关键词：

GENERATOR; MOTION;

D O I：

10.1088/0960-1317/19/11/115025

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a novel silicon-based and batch-processed MEMS electrostatic transducer for harvesting and converting the energy of vibrations into electrical energy without using an electret layer. Effective conversion from the mechanical-to-electric domains of 61 nW on a 60 M Omega resistive load, under a vibration level of 0.25 g at 250 Hz, has been demonstrated. Rigorous analysis of the efficiency of the harvester is presented, covering issues related with mechanical and electrical operation. Various schemes for the conditioning electronics are discussed and the harvested power measurements using a dc/dc converter are explained in detail. The paper concludes with a comparison with previous electrostatic transducers based on a new simple factor of merit.

引用

页数：12

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