Percolation view of Novolak dissolution .9. Deuterium isotope effect on dissolution rate

被引:9
作者
Kim, MS [1 ]
Reiser, A [1 ]
机构
[1] POLYTECH INST NEW YORK,INST IMAGING SCI,BROOKLYN,NY 11201
关键词
D O I
10.1021/ma970677f
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
A commercial Novolak resin was partially (OH groups) deuterated, and the dissolution rate of the deuterated material in 0.1 N solutions of KOD, NaOD, and LiOD in D2O was measured. The dissolution of the deuterated systems is considerably slower than that of the corresponding protonated systems. In both cases the dissolution rate depends on the nature of the base cation, and it is in fact a linear function of the reciprocal cross section of the ions. These results are-compatible with the view that the rate-determining step in Novolak dissolution is the deprotonation of phenol groups at the interface of the penetration zone with the resin matrix. The dissolution of deuterated Novolak in deuterated developers is strongly affected by the presence of salts of the base cations, in a manner similar to that of the protonated systems investigated in refs 1 and 2.
引用
收藏
页码:4652 / 4655
页数:4
相关论文
共 14 条
[1]  
Arcus R. A., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V631, P124, DOI 10.1117/12.963634
[2]   Conductance of salts in H2O-D2O mixtures [J].
Chittum, JP ;
La Mer, VK .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1937, 59 :2425-2430
[3]  
Garza C. M., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V920, P321, DOI 10.1117/12.968333
[4]   Factors affecting the dissolution rate of novolac resins .2. Developer composition effects [J].
Henderson, CL ;
Tsiartas, PC ;
Simpson, LL ;
Clayton, KD ;
Pancholi, S ;
Pawloski, AR ;
Willson, CG .
ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XIII, 1996, 2724 :481-490
[5]   The role of hydrogen bonds in conduction by hydrogen and hydroxyl ions [J].
Huggins, ML .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1931, 53 (02) :3190-3191
[6]  
KIM MS, IN PRESS MACROMOLECU
[7]   ION PRODUCT OF WATER SUBSTANCE, O-DEGREES-C-1000-DEGREES-C, 1-10,000 BARS - NEW INTERNATIONAL FORMULATION AND ITS BACKGROUND [J].
MARSHALL, WL ;
FRANCK, EU .
JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1981, 10 (02) :295-304
[8]   THERMODYNAMICS OF IONIZATION OF D2O AND D2PO-4 [J].
MESMER, RE ;
HERTING, DL .
JOURNAL OF SOLUTION CHEMISTRY, 1978, 7 (12) :901-913
[9]   Novolak-diazoquinone resists: The imaging systems of the computer chip [J].
Reiser, A ;
Shih, HY ;
Yeh, TF ;
Huang, JP .
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION IN ENGLISH, 1996, 35 (21) :2428-2440
[10]  
SHIH HY, IN PRESS MACROMOLECU