MEMS micro-valve for space applications

被引：98

作者：

Chakraborty, I ^{[1
]}

Tang, WC ^{[1
]}

Bame, DP ^{[1
]}

Tang, TK ^{[1
]}

机构：

[1] JPL, Pasadena, CA 91109 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 83卷 / 1-3期

基金：

美国国家航空航天局;

关键词：

MEMS; valve; piezoelectric; actuator; space;

D O I：

10.1016/S0924-4247(99)00382-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the development of a micro-electro-mechanical systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micro-propulsion, in situ chemical analysis of other planets, or microbiology. These systems often require very small yet reliable silicon valves with extremely low leak rates and long shelf lives. Also, they must survive the perils of space travel, which include unstoppable radiation, monumental shock and vibration forces, as well as extreme variations in temperature. Currently, no commercial MEMS valve meets these requirements. At JPL, we are developing a piezoelectric MEMS valve that attempts to address the unique problem of space. We begin with proven configurations that may seem familiar. However, we have implemented some major design innovations that should produce a superior valve. The JPL micro-valve is expected to have an extremely low leak rate, limited susceptibility to particulates, vibration or radiation, as well as a wide operational temperature range. Published by Elsevier Science S.A. All rights reserved.

引用

页码：188 / 193

页数：6