Surface modification of magnetic recording media by filtered cathodic vacuum arc

被引:56
作者
Zhang, H. -S. [1 ]
Komvopoulos, K. [1 ]
机构
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
关键词
DIAMOND-LIKE CARBON; AMORPHOUS-CARBON; FILM GROWTH; SUBPLANTATION MODEL; ION ENERGY; THIN-FILMS; COATINGS; HYBRIDIZATION; SPECTROSCOPY; SIMULATIONS;
D O I
10.1063/1.3245399
中图分类号
O59 [应用物理学];
学科分类号
摘要
Surface modification of a magnetic recording medium was accomplished by filtered cathodic vacuum arc (FCVA). The carbon overcoat of thin-film disks was removed by Ar+ ion sputter etching ill vacuum to prevent oxidation of the exposed magnetic medium. which was then modified by FCVA carbon plasma under conditions of zero and -100 V pulsed Substrate bias. Monte Carlo simulations performed with the T-DYN code, x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM). and Surface force microscopy (SFM) provided insight into carbon implantation profiles, Surface chemical composition, roughness, and nanomechanical properties of the surface-treated magnetic medium. The dependence Of surface modification oil the FCVA treatment conditions is discussed in the Context Of T-DYN. XPS. AFM. and SFM results. The findings of this Study demonstrate the potential of FCVA to provide overcoat-free magnetic recording media exhibiting oxidation resistance and enhanced nanomechanical properties. (C) 2009 American Institute of Physics [doi-10.1063/1.3245399]
引用
收藏
页数:7
相关论文
共 36 条
[1]   Investigations of the corrosion protection of ultrathin a-C and a-C:N overcoats for magnetic storage devices [J].
Bernhard, P ;
Ziethen, C ;
Ohr, R ;
Hilgers, H ;
Schönhense, G .
SURFACE & COATINGS TECHNOLOGY, 2004, 180 :621-626
[2]   TRIM-DYNAMIC applied to marker broadening and SIMS depth profiling [J].
Biersack, J .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 153 (1-4) :398-409
[3]   Ion energy distribution functions of vacuum arc plasmas [J].
Byon, E ;
Anders, A .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (04) :1899-1906
[4]  
Davis CA, 1995, SURF COAT TECH, V76, P316, DOI 10.1016/0257-8972(95)02553-7
[5]   Separation of the sp(3) and sp(2) components in the C1s photoemission spectra of amorphous carbon films [J].
Diaz, J ;
Paolicelli, G ;
Ferrer, S ;
Comin, F .
PHYSICAL REVIEW B, 1996, 54 (11) :8064-8069
[6]   The estimation of sputtering yields for SiC and Si [J].
Ecke, G ;
Kosiba, R ;
Kharlamov, V ;
Trushin, Y ;
Pezoldt, J .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2002, 196 (1-2) :39-50
[7]   Structure and properties of silver-containing a-C(H) films deposited by plasma immersion ion implantation [J].
Endrino, J. L. ;
Galindo, R. Escobar ;
Zhang, H. -S. ;
Allen, M. ;
Gago, R. ;
Espinosa, A. ;
Anders, A. .
SURFACE & COATINGS TECHNOLOGY, 2008, 202 (15) :3675-3682
[8]   PROPERTIES OF FILTERED-ION-BEAM-DEPOSITED DIAMOND-LIKE CARBON AS A FUNCTION OF ION ENERGY [J].
FALLON, PJ ;
VEERASAMY, VS ;
DAVIS, CA ;
ROBERTSON, J ;
AMARATUNGA, GAJ ;
MILNE, WI ;
KOSKINEN, J .
PHYSICAL REVIEW B, 1993, 48 (07) :4777-4782
[9]   Diamond-like carbon for magnetic storage disks [J].
Ferrari, AC .
SURFACE & COATINGS TECHNOLOGY, 2004, 180 :190-206
[10]   Compositional depth profile analysis of coatings on hard disks by X-ray photoelectron spectroscopy and imaging [J].
Gao, JX ;
Liu, E ;
Butler, DL ;
Zeng, AP .
SURFACE & COATINGS TECHNOLOGY, 2003, 176 (01) :93-102