Thermal and gas-sensing properties of planar-type micro gas sensor

被引：28

作者：

Chung, WY ^{[1
]}

Lim, JW

Lee, DD

Miura, N

Yamazoe, N

机构：

[1] Dongseo Univ, Sch Informat & Commun Engn, Pusan 617716, South Korea

[2] Kyungpook Natl Univ, Sch Elect & Elect Engn, Taegu 702701, South Korea

[3] Kyushu Univ, Grad Sch Engn Sci, Dept Mol & Mat Sci, Kasuga, Fukuoka 8168580, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2000年 / 64卷 / 1-3期

关键词：

gas sensor; micro sensor; planar-type sensor; spin-coating;

D O I：

10.1016/S0925-4005(99)00493-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A new planar-type micro gas sensor in which a gas-sensing layer was surrounded by a platinum heater horizontally on the same plane of a diaphragm was proposed to fit well to forming the gas-sensing layer by wet processes like spin-coating. The planar-type sensor simply fabricated by using only three masks for the photolithography processes shows very uniform temperature distribution over sensing layer and the device attached with a spin-coated thin layer of metal oxide of SnO2, In2O3 or WO3 showed a reasonable sensing performance to gases at 300 degrees C. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：118 / 123

页数：6

共 3 条

[1] H2S-SENSITIVE THIN-FILM FABRICATED FROM HYDROTHERMALLY SYNTHESIZED SNO2 SOL [J].

ANDO, M ;

SUTO, S ;

SUZUKI, T ;

TSUCHIDA, T ;

NAKAYAMA, C ;

MIURA, N ;

YAMAZOE, N .

JOURNAL OF MATERIALS CHEMISTRY, 1994, 4 (04) :631-633

[2] Gas sensing properties of indium oxide thin film on silicon substrate prepared by spin-coating method [J].

Chung, WY ;

Sakai, G ;

Shimanoe, K ;

Miura, N ;

Lee, DD ;

Yamazoe, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (9A) :4994-4998

[3]

Yamazoe N., 1992, CHEM SENSOR TECHNOLO, V4, P19

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