We have developed a highly robust, high performance 0.1 mu m passivated inP HEMT MMIC process with frequency capability up to 200 GHz and beyond. This process has demonstrated consistent wafer to wafer performance as well as remarkable uniformity with a wafer average Gmp of 1100 mS/mm +/- 44 mS for more than 1000 sites tested over a 2 inch diameter wafer. We report a D-band InP HEMT MMIC LNA using this process which has demonstrated 12 dB gain at 155 GHz. This represents the highest frequency solid-state amplifier ever reported to date.