Dielectric constant measurement of thin films by differential time-domain spectroscopy

被引：138

作者：

Jiang, ZP ^{[1
]}

Li, M ^{[1
]}

Zhang, XC ^{[1
]}

机构：

[1] Rensselaer Polytech Inst, Dept Phys, Troy, NY 12180 USA

来源：

APPLIED PHYSICS LETTERS | 2000年 / 76卷 / 22期

关键词：

D O I：

10.1063/1.126587

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a theoretical model and preliminary experimental results on the dielectric constant measurement of thin films by using differential time-domain spectroscopy. This technique greatly reduces the minimum measurable thickness, and it promises the dielectric constant measurement of mu m-thick thin films with the frequency range from GHz to THz. (C) 2000 American Institute of Physics. [S0003-6951(00)03922-X].

引用

页码：3221 / 3223

页数：3

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