Microfabricated Formaldehyde Gas Sensors

被引:57
作者
Flueckiger, Jonas [1 ]
Ko, Frank K. [2 ]
Cheung, Karen C. [1 ]
机构
[1] Univ British Columbia, Dept Elect & Comp Engn, Vancouver, BC V6T 1Z4, Canada
[2] Univ British Columbia, Dept Mat Engn, Vancouver, BC V6T 1Z4, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
formaldehyde sensor; MEMS; conducting polymer sensor; NIO THIN-FILM; SENSING CHARACTERISTICS; GASEOUS FORMALDEHYDE; MOLYBDENUM TRIOXIDE; AIR; TIO2; SENSITIVITY; FABRICATION; COMPOSITE; PHOTODEGRADATION;
D O I
10.3390/s91109196
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Formaldehyde is a volatile organic compound that is widely used in textiles, paper, wood composites, and household materials. Formaldehyde will continuously outgas from manufactured wood products such as furniture, with adverse health effects resulting from prolonged low-level exposure. New, microfabricated sensors for formaldehyde have been developed to meet the need for portable, low-power gas detection. This paper reviews recent work including silicon microhotplates for metal oxide-based detection, enzyme-based electrochemical sensors, and nanowire-based sensors. This paper also investigates the promise of polymer-based sensors for low-temperature, low-power operation.
引用
收藏
页码:9196 / 9215
页数:20
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