Nanoscale caliper for direct measurement of scanning force microscopy probes

被引：4

作者：

Biscarini, F

Levy, P

机构：

[1] CNR,IST CHIM & TECNOL MAT & COMPONCNTI ELETTR,LAMEL,I-40129 BOLOGNA,ITALY

[2] COMIS NACL ENERGIA ATOM,DEPT FIS,RA-1429 BUENOS AIRES,DF,ARGENTINA

来源：

APPLIED PHYSICS LETTERS | 1997年 / 71卷 / 07期

关键词：

D O I：

10.1063/1.119678

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We show the possibility to measure the effective tip shape and the lateral resolution of a scanning force microscopy (SFM) probe on the nanometer-scale directly from SFM images of SiC(0001), On this surface there are grooves 10-100-nm-wide related to cleavage plane, The SFM tip penetrates the groove but does not reach the bottom since its side walls touch both rims, The width of the narrowest groove resolved is the lateral resolution. The apparent topography across a groove yields directly the tip radius of curvature in excellent agreement with the values estimated fi om scanning electron micrographs. (C) 1997 American Institute of Physics.

引用

页码：888 / 890

页数：3

共 12 条

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