Highly ordered nanochannel-array architecture in anodic alumina

被引：1052

作者：

Masuda, H ^{[1
]}

Yamada, H ^{[1
]}

Satoh, M ^{[1
]}

Asoh, H ^{[1
]}

Nakao, M ^{[1
]}

Tamamura, T ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, OPTOELECT LAB, ATSUGI, KANAGAWA 24301, JAPAN

来源：

APPLIED PHYSICS LETTERS | 1997年 / 71卷 / 19期

关键词：

D O I：

10.1063/1.120128

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The development of the ordered channel array in the anodic porous alumina was initiated by the textured pattern of the surface made by the molding process, and growth of an almost defect-free channel array can be achieved throughout the textured area. The long-range-ordered channel array with dimensions on the order of millimeters with a channel density of 10(10) cm(-2) was obtained, and the aspect ratio was over 150. The master for molding could be used many times, which makes it possible to overcome problems in the conventional nanolithographic technique, such as low through-put and high cost. (C) 1997 American Institute of Physics. [S0003-6951(97)03145-8].

引用

页码：2770 / 2772

页数：3

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