Diamond-like carbon metal-semiconductor-metal switches for active matrix displays

被引：33

作者：

Egret, S

Robertson, J

Milne, WI

Clough, FJ

机构：

[1] UNIV CAMBRIDGE,DEPT ENGN,CAMBRIDGE CB2 1PZ,ENGLAND

[2] DE MONTFORT UNIV,EMERGING TECHNOL GRP,LEICESTER LE1 9BH,LEICS,ENGLAND

来源：

关键词：

DLC; applications; a-C; H; electrical properties;

D O I：

10.1016/S0925-9635(96)00676-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Metal-Semiconductor-Metal (MSM) layer structures of diamond-like carbon (DLC) are investigated for possible use as the switching elements in active matrix displays. Their high field conductivity is found to obey the Poole-Frenkel law for field-assisted hopping out of traps. The conduction parameters are studied as a function of the band gap of diamond-like carbon. The on- and off-currents of DLC MSM switches are compared to those of the presently used amorphous silicon nitride MSMs. (C) 1997 Elsevier Science S.A.

引用

页码：879 / 883

页数：5

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