Mechanism of molecular beam epitaxy growth of GaN nanowires on Si(111)

被引:203
作者
Debnath, R. K.
Meijers, R.
Richter, T.
Stoica, T.
Calarco, R.
Lueth, H.
机构
[1] Forschungszentrum Julich, Inst Bio & Nanosyst IBN1, D-52425 Julich, Germany
[2] Forschungszentrum Julich, Ctr Nanoelect Syst Informat Technol CNI, D-52425 Julich, Germany
关键词
D O I
10.1063/1.2715119
中图分类号
O59 [应用物理学];
学科分类号
摘要
GaN nanowires have been grown without external catalyst on Si(111) substrates by plasma-assisted molecular beam epitaxy. Nanowire aspect ratios (length/diameter) of about 250 have been achieved. During the initial stage of the growth, there is a nucleation process in which the number of wires increases and the most probable nucleation diameter of about 10 nm has been observed, which slowly increases with deposition time. For deposition time longer than the nucleation stage, the nanowire length as a function of diameter monotonically decreases. This phenomenon can be explained by adatom diffusion on the nanowire lateral surface towards the tip. (c) 2007 American Institute of Physics.
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页数:3
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