Nanoelectronics - New life for the 'dead layer'

被引:14
作者
Rabe, Karin M. [1 ]
机构
[1] Rutgers State Univ, Dept Phys & Astron, Piscataway, NJ 08854 USA
关键词
D O I
10.1038/nnano.2006.162
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Thin-film capacitors do not perform as well as electrostatic theory predicts. New atomistic calculations show that the culprit isn't defects in the film, but poor screening in the metal electrodes.
引用
收藏
页码:171 / U4
页数:3
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