Design, optimization and simulation on microelectromagnetic pump

被引：60

作者：

Gong, QL ^{[1
]}

Zhou, ZY ^{[1
]}

Yang, YH ^{[1
]}

Wang, XH ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Precis Instruments, Micromachine Div, Beijing 100084, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 83卷 / 1-3期

关键词：

micropump; FEM; electromagnetic; model and simulation;

D O I：

10.1016/S0924-4247(99)00384-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A four-layer electromagnetic micropump was designed, and its static and dynamic characters were studied from elements to full system. The mechanical model of the electromagnetic actuator was established, and some its geometric structural parameters were then optimized. The deflection of the pump membrane caused by the varying local magnetic driving forces was analyzed in particular by ANSYS FEM. Fluid theory and experiment data were used to analyze the microvalve. Full system model of the micropump and its differential equations were set up on the basis of physical liquid transmission procedure and system function block. Pulse and periodic pulse driving current responses were evaluated. The flow-frequency characteristic shows that the most effective driving frequency is 125 Hz. The effect of driving signal duty cycle and microvalve flow resistance was studied. The transfer function of this full system of micropump was also discussed. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：200 / 207

页数：8

共 12 条

[1]

ANN CH, 1993, THESIS GEORGIA I TEC

[2] Modeling micropumps with electrical equivalent networks [J].

Bourouina, T ;

Grandchamp, JP .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1996, 6 (04) :398-404

[3] Electrostatic actuation as a self-testing method for silicon pressure sensors [J].

Cozma, A ;

Puers, R .

SENSORS AND ACTUATORS A-PHYSICAL, 1997, 60 (1-3) :32-36

[4] Analytical static modelling and optimization of electrostatic micropumps [J].

Francais, O ;

Dufour, I ;

Sarraute, E .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1997, 7 (03) :183-185

[5]

GONG Q, 1999, MICROMACHINED ELECTR, P23

[6]

Gong QL, 1999, ISTM/99: 3RD INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, P15

[7]

HZHOFER A, 1995, J MICROMECH MICROENG, V5, P226

[8]

LIU Z, 1987, KINDKESSEL MODELING

[9] Electrofluidic full-system modelling of a flap valve micropump based on Kirchhoffian network theory [J].

Voigt, P ;

Schrag, G ;

Wachutka, G .

SENSORS AND ACTUATORS A-PHYSICAL, 1998, 66 (1-3) :9-14

[10]

YANG Y, P 1996 18 ANN INT 3, P31

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