Nucleation and growth control of carbon nanotubes in CVD process

被引：25

作者：

Yoon, YJ

Bae, JC

Baik, HK

Cho, SJ

Lee, SJ

Song, KM

Myung, NS

机构：

[1] Yonsei Univ, Sch Mat Sci, Dept Met Engn, Seadaemun Ku, Seoul 120749, South Korea

[2] Kyungsung Univ, Dept Phys, Pusan 608736, South Korea

[3] Kyungsung Univ, Dept Mat Sci & Engn, Pusan 608736, South Korea

[4] Konkuk Univ, Dept Appl Phys, Chungju 308701, South Korea

[5] Konkuk Univ, Dept Appl Chem, Chungju 308701, South Korea

来源：

PHYSICA B-CONDENSED MATTER | 2002年 / 323卷 / 1-4期

关键词：

agglomeration; CVD; SWNT; MWNT;

D O I：

10.1016/S0921-4526(02)01035-9

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

A catalyst for single-wall carbon nanotube could be achieved by an agglomeration process of co-sputtered Co-Mo thin film on flat silicon wafers. Through the control of catalyst size and carbon flux, SWNTs and double-wall carbon nanotubes were synthesized. The addition of Mo in the Co catalyst makes an effective nucleation site for SWNT formation and the feeding of CH4 gas in chemical vapor deposition reaction keeps the suitable carbon concentration to grow a single-wall structure. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：318 / 320

页数：3

共 5 条

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