Can micro-compression testing provide stress-strain data for thin films? A comparative study using Cu, VN, TiN and W coatings

被引：21

作者：

Dehm, G. ^{[1
,2
]}

Woergoetter, H. P. ^{[3
]}

Cazottes, S. ^{[1
]}

Purswani, J. M. ^{[4
]}

Gall, D. ^{[4
]}

Mitterer, C. ^{[5
]}

Kiener, D. ^{[1
]}

机构：

[1] Austrian Acad Sci, Erich Schmid Inst Mat Sci, A-8700 Leoben, Austria

[2] Univ Leoben, Dept Mat Phys, Leoben, Austria

[3] Forschungs GmbH, Mat Ctr Leoben, Leoben, Austria

[4] Rensselaer Polytech Inst, Dept Mat Sci & Engn, Troy, NY USA

[5] Univ Leoben, Dept Phys Met & Mat Testing, Leoben, Austria

来源：

THIN SOLID FILMS | 2009年 / 518卷 / 05期

关键词：

Micro-compression; Thin film; Nanoindentation; Hard coating; MECHANICAL-PROPERTIES; CRYSTAL PLASTICITY; SINGLE-CRYSTALS; STRENGTH; DEFORMATION; COPPER; SCALE; INDENTATION; FRACTURE; NANOINDENTATION;

D O I：

10.1016/j.tsf.2009.09.070

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Micro-compression testing using an instrumented micro- or nanoindenter equipped with a flat punch is a promising approach to measure the stress-strain response of miniaturized materials and to complement hardness and modulus measurements gained by nanoindendation. Focussed ion beam milling is employed to fabricate micron-sized compression pillars from 1 mu m thick single crystal Cu(001), TiN(001) and VN(001), films grown on MgO(001), and from a 6.7 mu m thick polycrystalline W coating deposited on Si(001). In situ micro-compression tests in a scanning electron microscope reveal reproducible stress-strain curves for W. a considerable statistical scatter in the flow stress for Cu and VN, and failure of TiN pillars by cleavage. A linear work-hardening rate of 2.7 +/- 1.2 GPa is determined for the polycrystalline W coating. The results are critically discussed taking into account material defects and the stiffness of the film-substrate system. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：1517 / 1521

页数：5

共 45 条

[1] Effects of pre-strain on the compressive stress-strain response of Mo-alloy single-crystal micropillars [J].

Bei, H. ;

Shim, S. ;

Pharr, G. M. ;

George, E. P. .

ACTA MATERIALIA, 2008, 56 (17) :4762-4770

[2] Effects of focused ion beam milling on the nanomechanical behavior of a molybdenum-alloy single crystal [J].

Bei, H. ;

Shim, S. .

APPLIED PHYSICS LETTERS, 2007, 91 (11)

[3] Compressive strengths of molybdenum alloy micro-pillars prepared using a new technique [J].

Bei, H. ;

Shim, S. ;

George, E. P. ;

Miller, M. K. ;

Herbert, E. G. ;

Pharr, G. M. .

SCRIPTA MATERIALIA, 2007, 57 (05) :397-400

[4] Scale dependence of mechanical properties of single crystals under uniform deformation [J].

Benzerga, AA ;

Shaver, NF .

SCRIPTA MATERIALIA, 2006, 54 (11) :1937-1941

[5] Stress-relaxation tests in the work-hardening regime of tungsten single crystals below 300 K [J].

Brunner, D. .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2008, 483-84 (1-2 C) :525-528

[6] Dislocation avalanches, strain bursts, and the problem of plastic forming at the micrometer scale [J].

Csikor, Ferenc F. ;

Motz, Christian ;

Weygand, Daniel ;

Zaiser, Michael ;

Zapperi, Stefano .

SCIENCE, 2007, 318 (5848) :251-254

[7] Measuring fracture toughness of coatings using focused-ion-beam-machined microbeams [J].

Di Maio, D ;

Roberts, SG .

JOURNAL OF MATERIALS RESEARCH, 2005, 20 (02) :299-302

[8] Size effect on strength and strain hardening of small-scale [111] nickel compression pillars [J].

Frick, C. P. ;

Clark, B. G. ;

Orso, S. ;

Schneider, A. S. ;

Arzt, E. .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2008, 489 (1-2) :319-329

[9] Indentation across size scales and disciplines: Recent developments in experimentation and modeling [J].

Gouldstone, Andrew ;

Chollacoop, Nuwong ;

Dao, Ming ;

Li, Ju ;

Minor, Andrew M. ;

Shen, Yu-Lin .

ACTA MATERIALIA, 2007, 55 (12) :4015-4039

[10]

Greer JR, 2006, ACTA MATER, V54, P1705, DOI [10.1016/j.actamat.2005.12.004, 10.1002/art.21799]

← 1 2 3 4 5 →