Some trends in the design of homo- and heterometallic molecular precursors of high-tech oxides

被引:167
作者
Hubert-Pfalzgraf, LG [1 ]
机构
[1] Univ Lyon 1, IRC, F-69626 Villeurbanne, France
关键词
oxoalkoxides; functional alkoxides; heterometallic alkoxides; sol-gel; MOCVD;
D O I
10.1016/S1387-7003(02)00664-0
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
The development of new materials for the technological demands requires chemical routes, in the case of oxides mostly being sol-gel or CVD processing, for their elaboration. Those processes need metallic precursors with a set of ligands that are able to provide suitable properties such as solubility or volatility, clean decomposition pathways, control of stoichiometry for multimetallic arrays, to name but a few. These aspects will be illustrated on some recent examples of non-silicon systems. (C) 2002 Elsevier Science B.V. All rights reserved.
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页码:102 / 120
页数:19
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