Rapid prototyping tools and methods for all-Topas® cyclic olefin copolymer fluidic microsystems

被引:41
作者
Bundgaard, F. [1 ]
Perozziello, G. [1 ]
Geschke, O. [1 ]
机构
[1] Tech Univ Denmark, Dept Micro & Nanotechnol, MIC, DK-2800 Lyngby, Denmark
关键词
polymers; bonding; micromilling; spin coating;
D O I
10.1243/09544062JMES295
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Topas (R), the cyclic olefin copolymer, from Topas Advanced Polymers GmbH has a number of advantages over polymers such as poly(methylmethacrylate), polydimethylsiloxane, and polycarbonate traditionally used in fluid microsystem manufacturing, such as low water absorption, high chemical resistance, good machinability, and good optical properties. A number of different processes for rapid and low-cost prototyping of all-Topas microfluidic systems, made with desktop machinery, are presented. Among the processes are micromilling of fluidic structures with a width down to 25 p,m and sealing of fluidic channels by thermal bonding or laser bonding, using a thin, spin-coated layer of carbon particles between the Topas substrate and the lid to absorb the laser light.
引用
收藏
页码:1625 / 1632
页数:8
相关论文
共 10 条
[1]   Polymer microfluidic devices [J].
Becker, H ;
Locascio, LE .
TALANTA, 2002, 56 (02) :267-287
[2]   CO2 laser microfabrication of an integrated polymer microfluidic manifold for the determination of phosphorus [J].
Bowden, M ;
Geschke, O ;
Kutter, JP ;
Diamond, D .
LAB ON A CHIP, 2003, 3 (04) :221-223
[3]  
BRENNER T, P 4M2005 C MULT MICR, P111
[4]  
BUNDGAARD F, P MUTAS 2004 MALM SW, P372
[5]   Rapid prototyping of polymer microsystems via excimer laser ablation of polymeric moulds [J].
Jensen, MF ;
McCormack, JE ;
Helbo, B ;
Christensen, LH ;
Christensen, TR ;
Geschke, O .
LAB ON A CHIP, 2004, 4 (04) :391-395
[6]  
KIM DS, P MUTAS 2005 BOST MA, P684
[7]   CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems [J].
Klank, H ;
Kutter, JP ;
Geschke, O .
LAB ON A CHIP, 2002, 2 (04) :242-246
[8]   Nanoimprint lithography in the cyclic olefin copolymer, Topas®, a highly ultraviolet-transparent and chemically resistant thermoplast [J].
Nielsen, T ;
Nilsson, D ;
Bundgaard, F ;
Shi, P ;
Szabo, P ;
Geschke, O ;
Kristensen, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (04) :1770-1775
[9]  
USSING T, P 4M2005 C MULT MICR, P291
[10]   Packaging of bio-MEMS: Strategies, technologies, and applications [J].
Velten, T ;
Ruf, HH ;
Barrow, D ;
Aspragathos, N ;
Lazarou, P ;
Jung, E ;
Malek, CK ;
Richter, M ;
Kruckow, J .
IEEE TRANSACTIONS ON ADVANCED PACKAGING, 2005, 28 (04) :533-546