Microfabrication in biology and medicine

被引:249
作者
Voldman, J
Gray, ML
Schmidt, MA
机构
[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
[2] MIT, Microsyst Technol Labs, Cambridge, MA 02139 USA
[3] MIT, Div Hlth Sci & Technol, Cambridge, MA 02139 USA
关键词
micromachining; microelectromechanical systems; cell biology; molecular biology; MEMS;
D O I
10.1146/annurev.bioeng.1.1.401
中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
Microfabrication uses integrated-circuit manufacturing technology supplemented by its own processes to create objects with dimensions in the range of micrometers to millimeters. These objects can have miniature moving parts, stationary structures, or both. Microfabrication has been used for many applications in biology and medicine. These applications fall into four domains: tools for molecular biology and biochemistry, tools for cell biology, medical devices, and biosensors. Microfabricated device structures may provide significantly enhanced function with respect to a conventional device. Sometimes microfabrication can enable devices with novel capabilities. These enhancing and enabling qualities are conferred when microfabrication is used appropriately to address the right types of problems. Herein, we describe microfabrication technology and its application tot biology and medicine. We detail several classes of advantages conferred by microfabrication and how these advantages have been used to date.
引用
收藏
页码:401 / 425
页数:25
相关论文
共 141 条
[51]   LIGHT-DIRECTED, SPATIALLY ADDRESSABLE PARALLEL CHEMICAL SYNTHESIS [J].
FODOR, SPA ;
READ, JL ;
PIRRUNG, MC ;
STRYER, L ;
LU, AT ;
SOLAS, D .
SCIENCE, 1991, 251 (4995) :767-773
[52]   Cellular micropatterns on biocompatible materials [J].
Folch, A ;
Toner, M .
BIOTECHNOLOGY PROGRESS, 1998, 14 (03) :388-392
[53]  
Fuhr G, 1998, TOP CURR CHEM, V194, P83
[54]  
FUHR G, 1996, ELECT MANIPULATION C, P37
[55]  
GAILBRAITH CG, 1998, MODERN OPTICS ELECT, P195
[56]   A MORPHOLOGICAL BIOSENSOR FOR MAMMALIAN-CELLS [J].
GIAEVER, I ;
KEESE, CR .
NATURE, 1993, 366 (6455) :591-592
[57]   Microfluidics - a review [J].
Gravesen, Peter ;
Branebjerg, Jens ;
Jensen, Ole Sondergard .
Journal of Micromechanics and Microengineering, 1993, 3 (04) :168-182
[58]   A new fabrication method for borosilicate glass capillary tubes with lateral inlets and outlets [J].
Gretillat, MA ;
Paoletti, F ;
Thiebaud, P ;
Roth, S ;
KoudelkaHep, M ;
deRooij, NF .
SENSORS AND ACTUATORS A-PHYSICAL, 1997, 60 (1-3) :219-222
[59]   High-aspect-ratio micromachining via deep x-ray lithography [J].
Guckel, H .
PROCEEDINGS OF THE IEEE, 1998, 86 (08) :1586-1593
[60]   Present and future role of chemical mechanical polishing in wafer bonding [J].
Gui, C ;
Elwenspoek, M ;
Gardeniers, JGE ;
Lambeck, PV .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (06) :2198-2204