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Ru-doped nanostructured carbon films

被引：18
作者：
Lian, GD
Dickey, EC
Ueno, M
Sunkara, MK
机构：
[1] Penn State Univ, University Pk, PA 16803 USA
[2] Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USA
[3] Penn State Univ, Inst Mat Res, University Pk, PA 16802 USA
[4] Univ Louisville, Dept Chem Engn, Louisville, KY 40292 USA
来源：
DIAMOND AND RELATED MATERIALS | 2002年 / 11卷 / 12期
基金：
美国国家科学基金会;
关键词：
cyclotron resonance chemical vapor deposition (CVD); nanocrystalline diamond (NCD) films; Ru-doped; electron microscopy; electron energy loss spectroscopy;
D O I：
10.1016/S0925-9635(02)00165-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Pure and Ru-doped carbon films are deposited on Si (100) substrates by electron cyclotron resonance chemical vapor deposition. The films are characterized by transmission electron microscopy, electron energy loss spectroscopy, energy dispersive X-ray spectroscopy and atomic force microscopy. In both the pure and Ru-doped samples, diamond nanocrystallites are formed in amorphous carbon matrices. The Ru-doped film contains much smaller diamond nanocrystallites (approx. 3 nm) than the pure samples (approx. 11 nm). Lower surface roughnesses are observed in both pure and Ru-doped samples as compared to other reported nanocrystalline diamond films. The conductivity of the Ru-doped film is significantly higher than that of the pure film. The results show that Ru-doped nanocrystalline diamond films have unique structures and properties as compared to pure nanocrystalline diamond films or metal doped diamond-like carbon films, which may offer advantages for electrochemical, optical-window, field emission or tribological applications. (C) 2002 Elsevier Science B.V. All rights reserved.
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页码：1890 / 1896
页数：7
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