Low-loss propagation in photonic crystal waveguides

被引：87

作者：

O'Faolain, L. ^{[1
]}

Yuan, X.

McIntyre, D.

Thoms, S.

Chong, H.

De la Rue, R. M.

Krauss, T. F.

机构：

[1] Univ St Andrews, Sch Phys & Astron, St Andrews, Fife, Scotland

[2] Natl Univ Def Technol, Sch Opt Engn, Changsha, Hunan, Peoples R China

[3] Univ Glasgow, Dept Elect & Elect Engn, Glasgow G12 8LT, Lanark, Scotland

来源：

ELECTRONICS LETTERS | 2006年 / 42卷 / 25期

关键词：

Crystal defects - Crystalline materials - Etching - Optimization;

D O I：

10.1049/el:20063077

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication and characterisation of high-quality silicon membrane photonic crystals are reported. The etching process was carefully optimised to give holes with very smooth and vertical sidewalls, resulting in propagation, with a minimum loss of 4.1 +/- 0.9 dB/cm in a single line defect (W1) waveguide.

引用

页码：1454 / 1455

页数：2

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