Characterization of defects in glasses and coatings on glasses by microanalytical techniques

被引:13
作者
Bange, K [1 ]
Müller, H [1 ]
Strubel, C [1 ]
机构
[1] Schott Glaswerke, Res & Technol Dev, D-55122 Mainz, Germany
关键词
glass defects; TiO2; films; EPMA; LA-ICP-MS; AFM;
D O I
10.1007/s006040050099
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The most relevant defects in glasses and thin films on glasses are categorized and investigated by the appropriate microanalytical techniques. Knots, which are local glassy inclusions, are described in greater derail. The combination of EPMA/EDX and LA-ICP-MS allow the determination of element concentrations in the defect down into the low ppm range, thus finally enabling the identification of a special source of the defect from other wise non distinguishable refractories. The results of analysis of stones and striae are reported and defect sources are discussed. Local defects in thin films are characterized which can be explained by high intrinsic compressive stress in the films. Typical glass and thin film defects are used to illustrate the problem-solving process in industrial labs.
引用
收藏
页码:493 / 503
页数:11
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