Fabrication and test of a thermopneumatic micropump with a corrugated p plus diaphragm

被引：152

作者：

Jeong, OC ^{[1
]}

Yang, SS ^{[1
]}

机构：

[1] Ajou Univ, Sch Elect Engn, Paldal Gu, Suwon 442749, South Korea

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 83卷 / 1-3期

关键词：

thermopneumatic micropump; corrugated p plus diaphragm; micromachining;

D O I：

10.1016/S0924-4247(99)00392-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

This paper presents a thermopneumatic micropump fabricated by micromachining. The micropump consists of a p + silicon diaphragm, a micro heater and a pair of nozzle/diffuser. The thermopneumatic actuator of this paper is characterized by a corrugated diaphragm, which is more flexible than a flat one. The diaphragm is driven by the air cavity pressure variation caused by the ohmic heating and the natural cooling. If the diaphragm of the micropump vibrates, the fluid flows in one direction through a nozzle/diffuser. The experimental result illustrates that the deflection of the corrugated diaphragm is about three times that of the flat one. The maximum flow rate of the micropump with the corrugated diaphragm is about 14 mu l/min at 4 Hz when the input voltage and duty ratio are 8 V and 40%, respectively. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：249 / 255

页数：7

共 12 条

[1]

JERMAN H, 1991, TRANSD 91 MONTR SWIT, P372

[2]

Lammerink T. S. J., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P254, DOI 10.1109/MEMSYS.1993.296913

[3]

OLSSON A, 1995, TRANSDUCERS 95 STOCK, V2, P291

[4]

Rich CA, 1999, PROC IEEE MICR ELECT, P130

[5]

THE DESIGN, FABRICATION, AND TESTING OF CORRUGATED SILICON-NITRIDE DIAPHRAGMS [J].

SCHEEPER, PR ;

OLTHUIS, W ;

BERGVELD, P .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1994, 3 (01) :36-42

[6]

Shoji S, 1998, TOP CURR CHEM, V194, P163

[7]

STEMME E, 1993, TRANSD 93 YOK, P110

[8]

Yanagisawa K., 1993, TRANSDUCERS 93, P102

[9]

Fabrication and electrostatic actuation of thin diaphragms [J].

Yang, EH ;

Yang, SS ;

Jeong, OC .

KSME INTERNATIONAL JOURNAL, 1998, 12 (02) :161-169

[10]

ZENGERLE R, 1995, MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995, P19, DOI 10.1109/MEMSYS.1995.472560

← 1 2 →