Dot-matrix electrical discharge machining for shaping fine structure

被引:5
作者
Furutani, K
Enami, T
Mohri, N
机构
来源
MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年
关键词
D O I
10.1109/MEMSYS.1997.581797
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
In this paper, a new prototyping method called a dot-matrix electrical discharge machining (EDM) with scanning motion is proposed, and a prototype of a machining unit by the dot-matrix method is developed. The machining process by the dot-matrix method is similar to printing motion with a dot impact printer. This method can be applied to not only EDM but also electrochemical machining and forming. A prototype of the machining unit has six feeding devices for thin wire electrodes. The electrodes of 300 mu m in diameter are arranged with the pitches of 760 mu m. To obtain smooth surface, a planetary motion in the xy plane is added to the feeding of the machining unit in the z direction, the same area is machined repeatedly or the machining unit is moved with fine feed. By compensating the wear of the electrode during the scanning EDM, various shapes with the accuracy of micrometers order can be obtained without a formed tool electrode. The surface modification by EDM with thin wire electrodes is also investigated.
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收藏
页码:180 / 185
页数:6
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