Recent progress in large-scale production of nanoscale multilayer/superlattice hard coatings

被引：79

作者：

Hovsepian, PE ^{[1
]}

Münz, WD ^{[1
]}

机构：

[1] Sheffield Hallam Univ, Mat Res Inst, Sheffield S1 1WB, S Yorkshire, England

来源：

VACUUM | 2002年 / 69卷 / 1-3期

关键词：

magnetron sputtering; arc evaporation; superlattice coatings;

D O I：

10.1016/S0042-207X(02)00305-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The paper describes the properties of superlattice structured PVD coatings dedicated to high-temperature performance: TiAlCrN/TiAlYN (period 1.7 nm), TiAlN/CrN (period 3.8 nm), to tribological applications: TiAlN/VN (period 3.0 rim), C/Cr (period 1.6 nm) and combined wear and corrosion resistance CrN/NbN (period 3.4 nm). The coatings have been deposited by the combined steered cathodic arc/unbalanced magnetron sputtering technique. Some technological details from the production process of the superlattice coatings in large scale are given and results from the performance of these novel PVD coatings in various industrial applications are presented. (C) 2002 Elsevier Science Ltd. All rights reserved.

引用

页码：27 / 36

页数：10

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