Fabrication process for a trapezoidal main pole for single-pole-type heads

被引：7

作者：

Okada, T ^{[1
]}

Kawato, Y ^{[1
]}

Haginoya, C ^{[1
]}

Nunokawa, I ^{[1
]}

Etoh, K ^{[1
]}

Fuyama, M ^{[1
]}

机构：

[1] Hitachi Ltd, Cent Res Lab, Kanagawa 2568510, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2002年 / 38卷 / 05期

关键词：

magnetic heads; perpendicular recording; single-pole-type-heads; trapezoidal;

D O I：

10.1109/TMAG.2002.802781

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We investigated the fabrication processes used for single-pole-type heads for perpendicular recording. To solve the problem of side write/erase on adjacent tracks, it is necessary to develop a trapezoidal main pole for single-pole-type heads. We therefore proposed two different fabrication processes: 1) a process using electroplating and ion milling and 2) a damascene process using reactive ion etching and chemical mechanical polishing. We made the trapezoidal main pole using the damascene process. An evaluation showed that using a single-pole-type heads with a trapezoidal main pole solved the side write/erase problem. There was also no problem with the writing performance of the heads. To make a narrower track (less than 250-nm wide), we optimized the process conditions.

引用

页码：2249 / 2252

页数：4