Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review

被引：354

作者：

Fu, Y. Q. ^{[1
,2
]}

Luo, J. K. ^{[2
,3
]}

Du, X. Y. ^{[2
]}

Flewitt, A. J. ^{[2
]}

Li, Y. ^{[4
]}

Markx, G. H. ^{[1
]}

Walton, A. J. ^{[4
]}

Milne, W. I. ^{[2
]}

机构：

[1] Heriot Watt Univ, Sch Engn & Phys Sci, Edinburgh EH14 4AS, Midlothian, Scotland

[2] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England

[3] Univ Bolton, Ctr Mat Res & Innovat, Bolton BL3 5AB, England

[4] Univ Edinburgh, Sch Engn, Scottish Microelect Ctr, Edinburgh EH10 7AT, Midlothian, Scotland

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2010年 / 143卷 / 02期

基金：

英国生物技术与生命科学研究理事会; 英国工程与自然科学研究理事会;

关键词：

ZnO; Film; Biosensor; Microfluidics; SAW; FBAR; Lab on chip; ZINC-OXIDE FILMS; THIN-FILMS; PREFERRED ORIENTATION; PIEZOELECTRIC FILM; RECENT PROGRESS; PLATE MODE; LOVE WAVE; SURFACE; FREQUENCY; RESONATOR;

D O I：

10.1016/j.snb.2009.10.010

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Recent developments on the preparation and application of ZnO films for acoustic wave-based microfluidics and biosensors are reviewed in this paper. High quality and strongly textured ZnO thin films can be prepared using many technologies. among which RF magnetron Sputtering is most commonly used. This paper reviews the deposition of ZnO film and Summarizes the factors influencing the microstructure, texture and piezoelectric Properties of deposited ZnO films. ZnO acoustic wave devices can be Successfully used as biosensors, based on the biomolecule recognition using highly sensitive shear horizontal and Love-wave surface acoustic waves, as well as film bulk acoustic resonator devices. The acoustic wave generated on the ZnO acoustic devices can induce significant acoustic streaming, small scale fluid mixing, pumping, ejection and atomization, depending on the wave mode, amplitude and Surface condition. The potential to fabricate an integrated lab-on-a-chip diagnostic system based on these ZnO acoustic wave technologies is also discussed. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：606 / 619

页数：14

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