Composition and morphological characteristics of chemically sprayed fluorine-doped zinc oxide thin films deposited on Si(100)

被引:9
作者
Castaneda, L.
Maldonado, A.
Cheang-Wong, J. C.
Terrones, M.
Olvera, M. de la L.
机构
[1] Inst Politecn Nacl, CINVESTAV, SEES, Depto Ing Elect, Mexico City 07000, DF, Mexico
[2] Univ Nacl Autonoma Mexico, Ctr Ciencias Aplicadas & Desarrollo Tecnol, Mexico City 04510, DF, Mexico
[3] Univ Iberoamer, Div Ciencia Arte & Tecnol, Dept Fis & Matemat, Santa Fe 012100, DF, Mexico
[4] Univ Nacl Autonoma Mexico, Inst Fis, Mexico City 01000, DF, Mexico
[5] IPICYT, Adv Mat Dept, San Luis Potosi 78216, Mexico
关键词
ZnO; RBS; thin films; semiconductor oxides; chemical spray;
D O I
10.1016/j.physb.2006.07.020
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Fluorine-doped zinc oxide thin films (ZnO:F) were deposited on Si(100) substrates by the chemical spray technique (CST) from an aged-solution. The effect of the substrate temperature on the morphology and composition of the ZnO:F thin films was studied. The films were polycrystalline, with a preferential growth along the ZnO (002) plane, irrespective of the deposition temperature. The average crystal size within the films was ca. 35 nm and the morphology of the surface was found to be dependent on the substrate temperature. At low substrate temperatures irregular-shaped grains were observed, whereas at higher temperatures uniform flat grains were obtained. Elemental analysis showed that the composition of the films is close to stoichiometric ZnO and that samples contain quite a low fluorine concentration, which decreases as a function of the deposition temperature. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:10 / 16
页数:7
相关论文
共 25 条
[1]   Absorption and reflection analysis of transparent conductive Ga-doped ZnO films [J].
Aghamalyan, NR ;
Kafadaryan, EA ;
Hovsepyan, RK ;
Petrosyan, SI .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 20 (01) :80-85
[2]   Fluorinated-chlorinated SiO2 films prepared at low temperature by remote plasma-enhanced chemical-vapor deposition using mixtures of SiF4 and SiCl4 [J].
Alonso, JC ;
Pichardo, E ;
Rodríguez-Fernandez, L ;
Cheang-Wong, JC ;
Ortiz, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 19 (02) :507-514
[3]   ELASTIC SCATTERING OF ALPHA-PARTICLES BY OXYGEN [J].
CAMERON, JR .
PHYSICAL REVIEW, 1953, 90 (05) :839-844
[4]   Ion beam studies of Tl-based superconducting films prepared from fluorides [J].
Cheang-Wong, JC ;
Jergel, M ;
Chromik, S ;
Strbík, V ;
Rickards, J ;
Jergel, M ;
Falcony, C ;
Andrade, E .
SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 2001, 14 (02) :90-95
[5]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[6]  
DELUCIO OG, 1999, INSTRUMENTATION DEV, V4, P12
[8]   ANOMALOUS INCORPORATION OF FLUORINE IN TIN OXIDE-FILMS PRODUCED WITH THE PYROSOL METHOD [J].
FERRON, J ;
ARCE, R .
THIN SOLID FILMS, 1991, 204 (02) :405-411
[9]   Electrical, structural and morphological properties of chemically sprayed F-doped ZnO films:: effect of the ageing-time of the starting solution, solvent and substrate temperature [J].
Guillén-Santiago, A ;
Olvera, MDL ;
Maldonado, A ;
Asomoza, R ;
Acosta, DR .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2004, 201 (05) :952-959
[10]  
HIRVONEN JP, 1995, HDB MODERN ION BEAM, P176