Plasma wave detection of terahertz radiation by silicon field effects transistors: Responsivity and noise equivalent power

被引:295
作者
Tauk, R.
Teppe, F.
Boubanga, S.
Coquillat, D.
Knap, W.
Meziani, Y. M.
Gallon, C.
Boeuf, F.
Skotnicki, T.
Fenouillet-Beranger, C.
Maude, D. K.
Rumyantsev, S. [1 ]
Shur, M. S.
机构
[1] Univ Montpellier 2, CNRS, UMR 5650, GES, F-34090 Montpellier, France
[2] Tohoku Univ, Elect Commun Res Inst, Sendai, Miyagi 9808577, Japan
[3] ST Microelect, F-38921 Crolles, France
[4] LETI, CEA, F-38054 Grenoble 9, France
[5] CNRS, MRI, Grenoble High Magnet Field Lab, F-38450 Grenoble, France
[6] Rensselaer Polytech Inst, Troy, NY 12180 USA
基金
俄罗斯基础研究基金会; 美国国家科学基金会;
关键词
D O I
10.1063/1.2410215
中图分类号
O59 [应用物理学];
学科分类号
摘要
Si metal oxide semiconductor field effect transistors (MOSFETs) with the gate lengths of 120-300 nm have been studied as room temperature plasma wave detectors of 0.7 THz electromagnetic radiation. In agreement with the plasma wave detection theory, the response was found to depend on the gate length and the gate bias. The obtained values of responsivity (<= 200 V/W) and noise equivalent power (>= 10(-10) W/Hz(0.5)) demonstrate the potential of Si MOSFETs as sensitive detectors of terahertz radiation. (c) 2006 American Institute of Physics.
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页数:3
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