Fabrication and analysis of a thick-film humidity sensor based on MnWO4

被引：30

作者：

Dellwo, U ^{[1
]}

Keller, P ^{[1
]}

Meyer, JU ^{[1
]}

机构：

[1] FRAUNHOFER INST BIOMED ENGN,SENSOR SYST MICROSYST DEPT,D-66386 ST INGBERT,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 61卷 / 1-3期

关键词：

humidity sensors; manganese tungstate; thick-film technology;

D O I：

10.1016/S0924-4247(97)80278-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A low-cost humidity sensor in thick-film technology has been developed based on MnWO4. In this paper, effects of preparation parameters and influences of additives on the sensor properties and membrane composition are described. Measurements of the sensor impedance are presented as a function of humidity.

引用

页码：298 / 302

页数：5

共 9 条

[1]

ARAI H, 1992, SENSORS, V3, pCH20

[2] POLYMER-BASED CAPACITIVE HUMIDITY SENSOR - CHARACTERISTICS AND EXPERIMENTAL RESULTS [J].

DELAPIERRE, G ;

GRANGE, H ;

CHAMBAZ, B ;

DESTANNES, L .

SENSORS AND ACTUATORS, 1983, 4 (01) :97-104

[3] CO, CO2, CH4 AND H2O SENSING BY POLYMER COVERED INTERDIGITATED ELECTRODE STRUCTURES [J].

HERMANS, ECM .

SENSORS AND ACTUATORS, 1984, 5 (03) :181-186

[4] ELECTRICAL AND THERMODYNAMIC CHARACTERIZATION OF WATER-VAPOR POLYMERIC FILM SYSTEM FOR HUMIDITY SENSING [J].

HUANG, PH .

SENSORS AND ACTUATORS, 1985, 8 (01) :23-28

[5] CERAMIC HUMIDITY SENSOR [J].

NITTA, T .

INDUSTRIAL & ENGINEERING CHEMISTRY PRODUCT RESEARCH AND DEVELOPMENT, 1981, 20 (04) :669-674

[6]

QU W, UNPUB NOVEL THICK FI

[7] CERAMIC HUMIDITY SENSORS [J].

SEIYAMA, T ;

YAMAZOE, N ;

ARAI, H .

SENSORS AND ACTUATORS, 1983, 4 (01) :85-96

[8] MONOLITHIC INTEGRATED-CIRCUIT IMPLEMENTATIONS OF THE CHARGE-FLOW TRANSISTOR OSCILLATOR MOISTURE SENSOR [J].

SENTURIA, SD ;

GARVERICK, SL ;

TOGASHI, K .

SENSORS AND ACTUATORS, 1981, 2 (01) :59-71

[9] HUMIDITY SENSORS - PRINCIPLES AND APPLICATIONS [J].

YAMAZOE, N ;

SHIMIZU, Y .

SENSORS AND ACTUATORS, 1986, 10 (3-4) :379-398

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