Prototype feedback-controlled bidirectional actuation system for MEMS applications

被引：12

作者：

Bhansali, S ^{[1
]}

Zhang, AL

Zmood, RB

Jones, PE

Sood, DK

机构：

[1] Univ Cincinnati, Ctr Microelect Sensors & Microelectromech Syst, Dept Elect & Comp Engn & Comp Sci, Cincinnati, OH 45221 USA

[2] Speech & Hearing Res, Cooperat Res Ctr Cochlear Implants, E Melbourne, Vic 3002, Australia

[3] Royal Melbourne Inst Technol, Dept Elect Engn, Melbourne, Vic 3000, Australia

[4] Royal Melbourne Inst Technol, Dept Elect & Commun Engn, Melbourne, Vic 3000, Australia

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2000年 / 9卷 / 02期

关键词：

beam mass structure; bidirectional actuation and control; electroplating; etching; feedback control; inductive sensor; magnetic actuator; magnetic microsuspension system; micromagnetic bearing; position sensor;

D O I：

10.1109/84.846705

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have successfully developed a one-degree-of-freedom microsuspension system, with active position control, as a paradigm of a micromagnetic bearing. This system integrates an electromagnetic actuator, a position sensor, and a feedback control system that provides active position control. This paper discusses the design and fabrication details of the microelectromechanical system (MEMS) components: the beam mass structure integrated with a drive coil and metallized targets, spacer plate, and sensor coils. It also discusses their integration with millimagnets and electronics. Noncontact magnetic bearings based on this principle have the potential of overcoming the tribe-physical issues associated with active MEMS devices.

引用

页码：245 / 251

页数：7

共 4 条

[1]

TAI YC, 1989, P 5 INT SOL STAT SEN, P108

[2]

Trimmer W. S., 1996, MICROMECHANICS MEMS

[3]

Wagner B., 1991, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), P27, DOI 10.1109/MEMSYS.1991.114764

[4] Wide-band low-input-impedance trans-impedance amplifiers for instrumentation applications [J].

Yu, PL ;

Zhang, CY ;

Zmood, RB .

MEASUREMENT SCIENCE AND TECHNOLOGY, 1997, 8 (11) :1351-1355

← 1 →