Thick-film resistive temperature sensors

被引:34
作者
Dziedzic, A
Golonka, LJ
Kozlowski, J
Licznerski, BW
Nitsch, K
机构
[1] Institute of Electronic Technology, Tech. University of Wrocław, 50-370 Wrocław
关键词
D O I
10.1088/0957-0233/8/1/011
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper discusses thick-film resistive temperature sensors investigated at the Technical University of Wroclaw. The technology and electrical properties of resistance temperature detectors, thermistors, low-temperature thermometers and heating elements are presented. The R(T) curve of chosen air-fireable NI-P based films agrees with Ni wire. The initially aged thermistors from the Mn1.6Co0.8Ni0.35Ru0.25O4/RuO2/glass system can operate in the range from roam temperature up to 673 K. The commercial thick-film resistors modified by the negative TCR drivers (e.g. TiO2 powder) are fully suitable for low-temperature measurements in the range from 20 to 100 K. The integrated gas sensors need heaters because temperature influences their sensitivity, selectivity and response time. The RuO2/Au thick-film compatible system based on commercially available resistive and conductive inks allows continuous long-term electrical heating of the sensor up to 673 K. The admissible operating temperature is much higher for the heaters made from conductive inks; for example fritless platinum heaters are satisfactory up to 1073 K.
引用
收藏
页码:78 / 85
页数:8
相关论文
共 16 条
[1]  
ARIMA H, 1994, THICK FILM SENSORS, P127
[2]  
BARYCKA I, 1981, ELECTROCOMP SCI TECH, V8, P221
[3]   HEATERS FOR GAS SENSORS FROM THICK CONDUCTIVE OR RESISTIVE FILMS [J].
DZIEDZIC, A ;
GOLONKA, LJ ;
LICZNERSKI, BW ;
HIELSCHER, G .
SENSORS AND ACTUATORS B-CHEMICAL, 1994, 19 (1-3) :535-539
[4]  
DZIEDZIC A, 1993, P 3 CZECH C MICR BRA, P79
[5]  
Golonka L., 1992, Hybrid Circuits, P9
[6]  
GOLONKA LJ, 1995, P 17 ISHM POL C, P75
[7]  
GOLONKA LJ, 1993, T TU KOSICE SLOVAKIA, V3, P49
[8]  
Holodnik B., 1986, Active and Passive Electronic Components, V12, P127, DOI 10.1155/1986/37913
[9]  
HOLODNIK B, 1983, P S EL TECHN BUD, P157
[10]  
HOLODNIK B, 1983, P INT MICR S ISHM, P542