A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides

被引：245

作者：

Cheben, P. ^{[1
]}

Schmid, J. H. ^{[1
]}

Delage, A. ^{[1
]}

Densmore, A. ^{[1
]}

Janz, S. ^{[1
]}

Lamontagne, B. ^{[1
]}

Lapointe, J. ^{[1
]}

Post, E. ^{[1
]}

Waldron, P. ^{[1
]}

Xu, D. -X. ^{[1
]}

机构：

[1] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada

来源：

OPTICS EXPRESS | 2007年 / 15卷 / 05期

关键词：

D O I：

10.1364/OE.15.002299

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a 50-channel high-resolution arrayed waveguide grating microspectrometer with a 0.2 nm channel spacing on a silicon-on-insulator (SOI) platform. The chip size is 8 mm x 8 mm. High channel density and spectral resolution are achieved using high aspect ratio 0.6 mu m x 1.5 mu m waveguide apertures to inject the light into the input combiner and to intercept different spectral channels at the output combiner focal region. The measured crosstalk is <-10 dB, the 3 dB channel bandwidth is 0.15 nm, and the insertion loss is -17 dB near the central wavelength of lambda = 1.545 mu m. (c) 2007 Optical Society of America.

引用

页码：2299 / 2306

页数：8

共 35 条

[1] Planar integrated optical waveguide spectroscopy [J].

Bradshaw, JT ;

Mendes, SB ;

Saavedra, SS .

ANALYTICAL CHEMISTRY, 2005, 77 (01) :28A-36A

[2] Polarization compensation in silicon-on-insulator arrayed waveguide grating devices [J].

Cheben, P ;

Bezinger, A ;

Delâge, A ;

Erickson, L ;

Janz, S ;

Xu, DX .

SILICON-BASED AND HYBRID OPTOELECTRONICS III, 2001, 4293 :15-22

[3] Scaling down photonic waveguide devices on the SOI platform [J].

Cheben, P ;

Xu, DX ;

Janz, S ;

Delâge, A .

VLSI CIRCUITS AND SYSTEMS, 2003, 5117 :147-156

[4] A 100-channel near-infrared SOI waveguide microspectrometer:: Design and fabrication challenges [J].

Cheben, P ;

Bogdanov, A ;

Delâge, A ;

Janz, S ;

Lamontagne, B ;

Picard, MJ ;

Post, E ;

Xu, DX .

OPTOELECTRONIC DEVICES AND INTEGRATION, PTS 1 AND 2, 2005, 5644 :103-110

[5] Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer [J].

Cheben, P ;

Xu, DX ;

Janz, S ;

Delage, A ;

Dalacu, D .

PHOTONICS PACKAGING AND INTEGRATION III, 2003, 4997 :181-189

[6]

Cheben P., 2007, OPTICAL WAVEGUIDES T

[7] Quantum grid infrared spectrometer [J].

Choi, KK ;

Dang, G ;

Little, JW ;

Leung, KM ;

Tamir, T .

APPLIED PHYSICS LETTERS, 2004, 84 (22) :4439-4441

[8] High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum [J].

Correia, JH ;

Bartek, M ;

Wolffenbuttel, RF .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (03) :553-559

[9] Recent developments in integrated spectrometers [J].

Delâge, A ;

Bidnyk, S ;

Cheben, P ;

Dossou, K ;

Janz, S ;

Lamontagne, B ;

Packirisamy, M ;

Xu, DX .

ICTON 2004: 6TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS, PROCEEDINGS, VOL 2, 2004, :78-83

[10] Compact wavelength router based on a Silicon-on-insulator arrayed waveguide grating pigtailed to a fiber array [J].

Dumon, P ;

Bogaerts, W ;

Van Thourhout, D ;

Taillaert, D ;

Baets, R ;

Wouters, J ;

Beckx, S ;

Jaenen, P .

OPTICS EXPRESS, 2006, 14 (02) :664-669

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