Deep UV mastering with a write compensation technique realizing over 20 GB/layer capacity disc

Recent progress in blue laser diodes has necessitated the development of ultra-high density mastering corresponding to a density several times higher than that of the digital versatile disk (DVD). As reported earlier, we developed a deep UV master recorder using an all-solid-state 266 nm laser, and confirmed an acceptable RF signal read-out quality from 20 Gbytes capacity with CD disc size, of which the bit density is equal to 14 Gbit/inch(2). Here, we report the improvement of RF signal jitter utilizing a write compensation technique for the mastering process. In this technique, the positions of the leading and trailing edges of the signal are shifted by pit signal processing (PSP). We confirmed an improved quality read-out signal of which the bottom jitter value is less than 8% from the 20 Gbytes disc, and also analyzed the signal jitter elements. In addition, experimental results of significantly higher densities of up to 30 Gbytes (21 Gbit/inch(2)) are demonstrated.