Yield evaluation of gold sensor electrodes used for fully electronic DNA detection arrays on CMOS

被引：9

作者：

Frey, A ^{[1
]}

Hofmann, F

Peters, R

Holzapfl, B

Schienle, M

Paulus, C

Schindler-Bauer, P

Kuhlmeier, D

Krause, J

Eckstein, G

Thewes, R

机构：

[1] Infineon Technol, Corp Res, D-81730 Munich, Germany

[2] November AG, Erlangen, Germany

[3] Siemens AG, D-8000 Munich, Germany

来源：

MICROELECTRONICS RELIABILITY | 2002年 / 42卷 / 9-11期

关键词：

D O I：

10.1016/S0026-2714(02)00234-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Gold electrodes are required as sensor elements to enable a fully electronic DNA detection technique. Aiming for the integration of a gold backend module into a standard CMOS process, the yield of this extra process is evaluated. Data are presented from adequate passive test structures and from a fully processed active CMOS chip operated in a test mode. Experiments with DNA molecules applied to the chip demonstrate proper biochemical operation obtained with the considered process options. High yield is achieved. (C) 2002 Elsevier Science Ltd. All rights reserved.

引用

页码：1801 / 1806

页数：6