Substrate curvature due to thin film mismatch strain in the nonlinear deformation range

被引:177
作者
Freund, LB [1 ]
机构
[1] Brown Univ, Div Engn, Providence, RI 02912 USA
基金
美国国家科学基金会;
关键词
buckling; finite deflections layered material; stability and bifurcation; thin films;
D O I
10.1016/S0022-5096(99)00070-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The physical system considered is a thin film bonded to the surface of an initially flat circular substrate, in the case when a residual stress exists due to an incompatible mismatch strain in the film. The magnitude of the mismatch strain is often inferred from a measurement of the curvature it induces in the substrate. This discussion is focused on the limit of the linear range of the relationship between the mismatch strain and the substrate curvature, on the degree to which the substrate curvature becomes spatially nonuniform in the range of geometrically nonlinear deformation, and on the bifurcation of deformation mode from axial symmetry to asymmetry with increasing mismatch strain. Results are obtained on the basis of both simple models and more detailed finite element simulations. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:1159 / 1174
页数:16
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