Observed substrate topography-mediated lateral patterning of diblock copolymer films

被引:150
作者
Fasolka, MJ [1 ]
Harris, DJ [1 ]
Mayes, AM [1 ]
Yoon, M [1 ]
Mochrie, SGJ [1 ]
机构
[1] MIT, DEPT PHYS, CAMBRIDGE, MA 02139 USA
关键词
D O I
10.1103/PhysRevLett.79.3018
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We study the morphology of symmetric diblock copolymer films with thicknesses below the bulk equilibrium period supported by both flat and corrugated substrates. In this thickness regime, the film morphology is characterized by the formation of uniformly sized lateral domains. On flat substrates, these domains are randomly arranged. In contrast, on corrugated substrates, similar films exhibit domains which decorate the peaks of the substrate corrugations. Our observations suggest a novel and simple scheme for the lateral nanometer scale patterning of diblock copolymer films.
引用
收藏
页码:3018 / 3021
页数:4
相关论文
共 24 条
  • [1] NEUTRON REFLECTIVITY STUDIES OF THE SURFACE-INDUCED ORDERING OF DIBLOCK COPOLYMER FILMS
    ANASTASIADIS, SH
    RUSSELL, TP
    SATIJA, SK
    MAJKRZAK, CF
    [J]. PHYSICAL REVIEW LETTERS, 1989, 62 (16) : 1852 - 1855
  • [2] ANNIS BK, 1992, MAKROMOL CHEM, V193, P2589
  • [3] QUANTUM CRYSTALLITES AND NONLINEAR OPTICS
    BRUS, L
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1991, 53 (06): : 465 - 474
  • [4] MORPHOLOGY OF STEPS IN TERRACED BLOCK-COPOLYMER FILMS
    CARVALHO, BL
    THOMAS, EL
    [J]. PHYSICAL REVIEW LETTERS, 1994, 73 (24) : 3321 - 3324
  • [5] SURFACE ORDERING PHENOMENA IN BLOCK COPOLYMER MELTS
    FREDRICKSON, GH
    [J]. MACROMOLECULES, 1987, 20 (10) : 2535 - 2542
  • [6] HELFAND E, 1982, DEV BLOCK COPOLYMERS, V1
  • [7] Observed surface energy effects in confined diblock copolymers
    Kellogg, GJ
    Walton, DG
    Mayes, AM
    Lambooy, P
    Russell, TP
    Gallagher, PD
    Satija, SK
    [J]. PHYSICAL REVIEW LETTERS, 1996, 76 (14) : 2503 - 2506
  • [8] Mansky P, 1996, APPL PHYS LETT, V68, P2586, DOI 10.1063/1.116192
  • [9] MANSKY P, UNPUB
  • [10] MORKVED TL, 1996, SCIENCE, V273, P932