AlGaN/GaN double heterostructure channel modulation doped field effect transistors (MODFETs)

被引:57
作者
Fan, ZF
Lu, CZ
Botchkarev, AE
Tang, H
Salvador, A
Aktas, O
Kim, W
Morkoc, H
机构
[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
[2] WRIGHT LABS,WRIGHT PATTERSON AFB,OH
关键词
MODFET; semiconductor devices;
D O I
10.1049/el:19970497
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
AlGaN/GaN double heterostructure channel modulation doped field effect-transistors (DHCMODFETs) with a 1.5-1.75 mu m gate length and a 3 mu m channel length exhibiting record transconductances and saturation current levels have been demonstrated. The ma? maximum normalised drain current and transconductance are similar to 1100mA/mm and 270mS/mm, respectively, at room temperature. Near pinch-off, the drain breakdown voltage is similar to 80V. At an elevated temperature of 300 degrees C, the maximum drain source current and extrinsic transconductance of the device are similar to 500mA/mm and 120mS/mm, respectively.
引用
收藏
页码:814 / 815
页数:2
相关论文
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