共 23 条
[4]
ENHANCED ETCHING OF SI(100) BY NEUTRAL CHLORINE BEAMS WITH KINETIC ENERGIES UP TO 6 EV
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (05)
:2217-2221
[5]
CENIAN A, 1995, J CHEM PHYS, V103, P9276
[6]
ELECTRONICALLY EXCITED PHOTODISSOCIATION AND DESORPTION OF MOLECULES ON SURFACES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (04)
:473-475