Replication techniques for ceramic microcomponents with high aspect ratios

被引：30

作者：

Bauer, W ^{[1
]}

Knitter, R

Emde, A

Bartelt, G

Göhring, D

Hansjosten, E

机构：

[1] Forschungszentrum Karlsruhe GmbH, Inst Mat Forsch 3, D-76021 Karlsruhe, Germany

[2] Forschungszentrum Karlsruhe GmbH, Inst Mikroverfahrenstech, D-76021 Karlsruhe, Germany

来源：

MICROSYSTEM TECHNOLOGIES | 2002年 / 9卷 / 1-2期

关键词：

D O I：

10.1007/s00542-002-0200-z

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Most processes for the manufacturing of ceramic components have in common that they are based on a powder-technological shaping process using a negative mold and subsequent thermal compaction. For microcomponents these processes require special adjustments especially when high aspect ratio structures have to be fabricated. Shaping methods that allow the application of silicone rubber molds, like low-pressure injection molding (LPIM) or centrifugal casting, not only have the potential to fabricate ceramic components with high aspect ratios but also offer a possibility for the rapid manufacturing of ceramic microcomponents.

引用

页码：81 / 86

页数：6

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