Precision evaluation in Kr adsorption for small BET surface area measurements of less than 1 m2

被引:11
作者
Yanazawa, H
Ohshika, K
Matsuzawa, T
机构
[1] Hitachi Ltd, Device Dev Ctr, Tokyo 1988512, Japan
[2] Hitachi Ltd, Semicond & Integrated Circuit Div, Tokyo 1870022, Japan
[3] Litho Tech Japan Corp, Kawaguchi, Saitama 3320034, Japan
来源
ADSORPTION-JOURNAL OF THE INTERNATIONAL ADSORPTION SOCIETY | 2000年 / 6卷 / 01期
关键词
Kr adsorption; BET surface area; vacuum jacket; constant volume adsorption cell;
D O I
10.1023/A:1008951300326
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A volumetric Kr-adsorption apparatus using a precise capacitance manometer has been developed. A specially designed adsorption cell (CVC: constant volume adsorption cell) utilizing a vacuum jacket (Joyner et al., 1949) is adopted to keep the adsorption cell volume constant regardless of the variation in liquid nitrogen level throughout the experiment. Using the CVC, the pressure change in accordance with liquid N-2 supply cycle has been minimized to less than 0.01 Pa compare to about 1 Pa for conventional cell. Time dependent change of the adsorption cell volume and repeatability in its measurements have been demonstrated in detail using helium gas. Good linearity of the BET plot of the Kr adsorption isotherm on several hundred cm(2) samples are demonstrated in the relative pressure range from 0.05 to 0.35.
引用
收藏
页码:73 / 77
页数:5
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