Nanostructure and chemical state of nanocomposites prepared by Co-sputtering method

被引:9
作者
Koshizaki, N
Yasumoto, K
Terauchi, S
Umehara, H
Sasaki, T
Oyama, T
机构
[1] Natl. Inst. of Mat. and Chem. Res., Tsukuba, Ibaraki, 305
来源
NANOSTRUCTURED MATERIALS | 1997年 / 9卷 / 1-8期
关键词
D O I
10.1016/S0965-9773(97)00131-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We prepared two types of nanocomposites by the co-sputtering method: (a) Si-dispersed in SiO2 Al2O3 or MgO, and (b) MOX/SiO2, MOX/Al2O3 (M: transition metal from Ti to Zn). The nanostructures and the chemical states of nanocomposite constituents were characterized by TEM and XPS, respectively. The relationship between the optical properties and the nanostructures were also studied. For Si-dispersed nanocomposites, photoluminescence increased during the disproportionation process of SiOX. Quantitative analysis of nanocomposite series, MOX/SiO2 and MOX/Al2O3 revealed that the concentration of dispersoid did not always agree with simple estimations from the sputtering yield and the area ratio. (C) 1997 Acta Metallurgica Inc.
引用
收藏
页码:587 / 590
页数:4
相关论文
共 7 条
[1]   PHOTOLUMINESCENCE OF SI-RICH SIO2-FILMS - SI CLUSTERS AS LUMINESCENT CENTERS [J].
HAYASHI, S ;
NAGAREDA, T ;
KANZAWA, Y ;
YAMAMOTO, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9A) :3840-3845
[2]  
Kelly R., 1973, Radiation Effects, V19, P39, DOI 10.1080/00337577308232213
[3]   ATTEMPT TO UNDERSTAND PREFERENTIAL SPUTTERING [J].
KELLY, R .
NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :553-558
[4]  
KINERI T, 1995, NIPPON SERAM KYO GAK, V103, P117, DOI 10.2109/jcersj.103.117
[5]  
KOSHIZAKI N, 1995, JPN J APPL PHYS, V34, P119
[6]  
SASAKI T, 1996, UNPUB MRS 1996 FALL
[7]  
Vossen JL, 1978, THIN FILM PROCESSES, P15