Large-area and double-sided pulsed laser deposition of Y-Ba-Cu-O thin films applied to HTSC microwave devices

被引：24

作者：

Lorenz, M

Hochmuth, H

Natusch, D

Borner, H

Tharigen, T

Patrikarakos, DG

Frey, J

Kreher, K

Senz, S

Kastner, G

Hesse, D

Steins, M

Schmitz, W

机构：

[1] MAX PLANCK INST MIKROSTRUKTURPHYS,D-06120 HALLE,GERMANY

[2] UNIV LEIPZIG,INST MINERAL KRISTALLOG & MAT WISSENSCH,D-04275 LEIPZIG,GERMANY

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1997年 / 7卷 / 02期

关键词：

D O I：

10.1109/77.620738

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Pulsed laser deposition (PLD) of YBa2Cu3O7-x (YBCO) thin films on both sides of 3-inch diameter sapphire wafers and LaAlO3 (LAG) cylinder substrates, respectively, is a basic and flexible technique in order to optimize microwave bandpass filters for wireless communication systems. The large-area and double-side PLD technique allows homogeneous and reproducible YBCO deposition on both substrate sides with inductively measured critical current densities j(c) of 3 x 10(6) to 5 x 10(6) A/cm(2) at 77 K with a YBCO thickness of 350 nm to 600 nm. Selected results of compositional, structural, electrical, and microwave characterization of the PLD-YBCO films are reported.

引用

页码：1240 / 1243

页数：4

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