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S-shaped magnetic macroparticle filter for cathodic arc deposition

被引：59
作者：
Anders, S
Anders, A
Dickinson, MR
MacGill, RA
Brown, IG
机构：
[1] Lawrence Berkeley National Laboratory, University of California, Berkeley
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 1997年 / 25卷 / 04期
关键词：
films; filtering; plasma generation; vacuum arcs;
D O I：
10.1109/27.640683
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
A new magnetic macroparticle fitter design consisting of two 90 degrees filters forming an S shape is described, The transport properties of this S filter are investigated using Langmuir and deposition probes, It is shown that the filter efficiency is the product of the efficiencies of two 90 degrees filters, and the deposition rate is still acceptably high to perform thin-film deposition, Films of amorphous hard carbon have been deposited using a 90 degrees filter and the S filter, and the macroparticle contents of the firms are compared.
引用
收藏
页码：670 / 674
页数：5
相关论文
共 18 条
  • [1] Aksenov I. I., 1980, Soviet Physics - Technical Physics, V25, P1164
  • [2] AKSENOV II, 1978, INSTRUM EXP TECH+, V21, P1416
  • [3] TRANSPORT OF VACUUM-ARC PLASMAS THROUGH MAGNETIC MACROPARTICLE FILTERS
    ANDERS, A
    ANDERS, S
    BROWN, IG
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 1995, 4 (01) : 1 - 12
  • [4] ANDERS A, 1994, MATER RES SOC SYMP P, V316, P833
  • [5] EFFECT OF DUCT BIAS ON TRANSPORT OF VACUUM-ARC PLASMAS THROUGH CURVED MAGNETIC FILTERS
    ANDERS, A
    ANDERS, S
    BROWN, IG
    [J]. JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) : 4900 - 4905
  • [6] EFFECT OF VACUUM ARE DEPOSITION PARAMETERS ON THE PROPERTIES OF AMORPHOUS-CARBON THIN-FILMS
    ANDERS, S
    ANDERS, A
    BROWN, IG
    WEI, B
    KOMVOPOULOS, K
    AGER, JW
    YU, KM
    [J]. SURFACE & COATINGS TECHNOLOGY, 1994, 68 : 388 - 393
  • [7] FOCUSED INJECTION OF VACUUM-ARC PLASMAS INTO CURVED MAGNETIC FILTERS
    ANDERS, S
    ANDERS, A
    BROWN, I
    [J]. JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) : 4895 - 4899
  • [8] MACROPARTICLE-FREE THIN-FILMS PRODUCED BY AN EFFICIENT VACUUM-ARC DEPOSITION TECHNIQUE
    ANDERS, S
    ANDERS, A
    BROWN, I
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (06) : 4239 - 4241
  • [9] DIAMOND-LIKE CARBON-FILMS SYNTHESIZED BY CATHODIC ARC EVAPORATION
    COLL, BF
    SATHRUM, P
    AHARONOV, R
    TAMOR, MA
    [J]. THIN SOLID FILMS, 1992, 209 (02) : 165 - 173
  • [10] COMPARISON OF 2 FILTERED CATHODIC ARC SOURCES
    FALABELLA, S
    SANDERS, DM
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1992, 10 (02): : 394 - 397
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