Development of a mesoscale/nanoscale plasma generator

被引：28

作者：

Terashima, K ^{[1
]}

Howald, L ^{[1
]}

Haefke, H ^{[1
]}

Guntherodt, HJ ^{[1
]}

机构：

[1] UNIV BASEL, INST PHYS, CH-4056 BASEL, SWITZERLAND

来源：

THIN SOLID FILMS | 1996年 / 281卷

关键词：

plasma processing and deposition; nanostructures; glow discharge;

D O I：

10.1016/0040-6090(96)08707-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have developed a mesoscale/nanoscale discharge plasma generator, which consists of two electrodes with an ultrasmall, gap on the mesoscale/nanoscale controlled by two piezoelectric actuators and a Langmuir plasma probe system housed in a high-pressure chamber. By means of this apparatus, the mesoscale/nanoscale N-2 and air plasmas in the range between 10 mu m and 800 nm have been realized. Moreover, Langmuir probe measurements revealed an interesting characteristic, namely a non-equilibrium cold nature of the plasmas, even in high-pressure environments.

引用

页码：634 / 636

页数：3