Second harmonic generation in hydrogenated amorphous silicon

被引:16
作者
Alexandrova, S
Danesh, P
Maslyanitsyn, IA
机构
[1] Bulgarian Acad Sci, Inst Solid State Phys, BU-1784 Sofia, Bulgaria
[2] Russian Acad Sci, Inst Gen Phys, Moscow 117942, Russia
关键词
D O I
10.1103/PhysRevB.61.11136
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The first application of the second harmonic generation (SHG) technique to investigate the structure of a-Si:H films is reported. Dependence of SHG on the type of substrate material and the temperature during deposition has been observed. The origin of SHG is discussed. A stress model is proposed to explain the experimental results. It is suggested that the second harmonic is generated in a strained layer close to the substrate.
引用
收藏
页码:11136 / 11138
页数:3
相关论文
共 19 条
[1]  
AKTSIPETROV OA, 1986, ZH EKSP TEOR FIZ, V64, P167
[2]  
DANESH P, 1993, P SOC PHOTO-OPT INS, V983, P1078
[3]   IDENTIFICATION OF STRAINED SILICON LAYERS AT SI-SIO2 INTERFACES AND CLEAN SI SURFACES BY NONLINEAR-OPTICAL SPECTROSCOPY [J].
DAUM, W ;
KRAUSE, HJ ;
REICHEL, U ;
IBACH, H .
PHYSICAL REVIEW LETTERS, 1993, 71 (08) :1234-1237
[4]   THE STRUCTURE OF AMORPHOUS HYDROGENATED SILICON AND ITS ALLOYS - A REVIEW [J].
ELLIOTT, SR .
ADVANCES IN PHYSICS, 1989, 38 (01) :1-88
[5]   FEMTOSECOND SPECTROSCOPIC STUDY OF ULTRAFAST CARRIER RELAXATION IN HYDROGENATED AMORPHOUS-SILICON A-SI-H [J].
ESSER, A ;
HEESEL, H ;
KURZ, H ;
WANG, C ;
PARSONS, GN ;
LUCOVSKY, G .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (03) :1235-1239
[6]   INHOMOGENEOUS DEFORMATION OF SILICON SURFACE-LAYERS PROBED BY 2ND-HARMONIC GENERATION IN REFLECTION [J].
GOVORKOV, SV ;
EMELYANOV, VI ;
KOROTEEV, NI ;
PETROV, GI ;
SHUMAY, IL ;
YAKOVLEV, VV .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1989, 6 (06) :1117-1124
[7]   INTERNAL-STRESS, THERMAL-EXPANSION COEFFICIENT AND BI-ELASTIC MODULUS OF PHOTOCHEMICALLY VAPOR-DEPOSITED HYDROGENATED AMORPHOUS-SILICON FILMS [J].
GUO, SW ;
WANG, WY .
THIN SOLID FILMS, 1992, 219 (1-2) :135-138
[8]   ELECTRONIC-TRANSITIONS AT THE CAF2/SI(111) INTERFACE PROBED BY RESONANT 3-WAVE-MIXING SPECTROSCOPY [J].
HEINZ, TF ;
HIMPSEL, FJ ;
PALANGE, E ;
BURSTEIN, E .
PHYSICAL REVIEW LETTERS, 1989, 63 (06) :644-647
[9]   DEFECT EQUILIBRATION AND INTRINSIC STRESS IN UNDOPED HYDROGENATED AMORPHOUS-SILICON [J].
KITSUNO, Y ;
CHO, GS ;
DREWERY, J ;
HONG, WS ;
PEREZMENDEZ, V .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (3A) :1261-1267
[10]  
LUBKE G, 1993, PHYS REV B, V47, P10389