A study of sheath electric fields in planar magnetron discharges using laser induced fluorescence spectroscopy

被引：19

作者：

Choi, YW

Bowden, M

Muraoka, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 11期

关键词：

electric field; sheaths; magnetron; helium; glow discharge; laser induced fluorescence;

D O I：

10.1143/JJAP.35.5858

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Measurement of electric field distributions in magnetron sputtering discharges is a necessary step in understanding the dynamics of the sputtering process. Electric field measurements were made in BCl3 and helium DC magnetron discharges using two different laser induced fluorescence spectroscopic techniques. Direct measurement of the electric field distribution was possible for the helium plasma measurements.

引用

收藏

页码：5858 / 5861

页数：4

相关论文

共 10 条

[1] MEASUREMENTS OF THE CATHODE SHEATH IN A MAGNETRON SPUTTERING DISCHARGE USING LASER-INDUCED FLUORESCENCE [J].

BOWDEN, MD ;

NAKAMURA, T ;

MURAOKA, K ;

YAMAGATA, Y ;

JAMES, BW ;

MAEDA, M .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (08) :3664-3667

[2] MEASUREMENTS OF SHEATH ELECTRIC-FIELDS IN A HIGH-PRESSURE HELIUM RADIO-FREQUENCY DISCHARGE [J].

BOWDEN, MD ;

CHOI, YW ;

MURAOKA, K ;

MAEDA, M .

APPLIED PHYSICS LETTERS, 1995, 66 (09) :1059-1061

[3] NEGATIVE-ION KINETICS IN RF GLOW-DISCHARGES [J].

GOTTSCHO, RA ;

GAEBE, CE .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) :92-102

[4] ELECTRIC-FIELD MEASUREMENTS IN 13.56 MHZ HELIUM DISCHARGES [J].

GREENBERG, KE ;

HEBNER, GA .

APPLIED PHYSICS LETTERS, 1993, 63 (24) :3282-3284

[5] TIME RESOLVED FLUORESCENCE FROM PARITY MIXED ROTATIONAL ENERGY-LEVELS - COLLISIONS VS ELECTRIC-FIELD EFFECTS [J].

MANDICH, ML ;

GAEBE, CE ;

GOTTSCHO, RA .

JOURNAL OF CHEMICAL PHYSICS, 1985, 83 (07) :3349-3357

[6]

MOORE CA, 1984, PHYS REV LETT, V52, P583

[7] SIMULATIONS OF RF GLOW-DISCHARGES IN SF6 BY THE RELAXATION CONTINUUM MODEL - PHYSICAL STRUCTURE AND FUNCTION OF THE NARROW-GAP REACTIVE-ION ETCHER [J].

NAKANO, N ;

SHIMURA, N ;

PETROVIC, ZL ;

MAKABE, T .

PHYSICAL REVIEW E, 1994, 49 (05) :4455-4465

[8] MODEL OF ENERGETIC ELECTRON-TRANSPORT IN MAGNETRON DISCHARGES [J].

SHERIDAN, TE ;

GOECKNER, MJ ;

GOREE, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1990, 8 (01) :30-37

[9] SPATIAL STRUCTURE OF A PLANAR MAGNETRON DISCHARGE [J].

WENDT, AE ;

LIEBERMAN, MA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (02) :902-907

[10] INSITU CALIBRATION FOR ELECTRIC-FIELD MEASUREMENTS IN GLOW-DISCHARGE PLASMAS BY LASER-INDUCED FLUORESCENCE USING THE OPTOGALVANIC TECHNIQUE [J].

YAMAGATA, Y ;

KAWANO, Y ;

MURAOKA, K ;

MAEDA, M ;

AKAZAKI, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (01) :166-170