Real-time monitoring of sub-ppb concentrations of aromatic volatiles with a MEMS-enabled miniaturized gas-chromatograph

被引:176
作者
Zampolli, S. [1 ]
Elmi, I. [1 ]
Mancarella, F. [1 ]
Betti, P. [2 ]
Dalcanale, E. [2 ]
Cardinali, G. C. [1 ]
Severi, M. [1 ]
机构
[1] CNR, IMM, I-40126 Bologna, Italy
[2] Univ Parma, Dept Organ & Ind Chem, I-43100 Parma, Italy
关键词
Gas chromatography; MOX; Benzene; MEMS; Environmental monitoring; uTAS; HOST-GUEST COMPLEXATION; MICROFABRICATED COLUMNS; ORGANIC-COMPOUNDS; VOC DETECTION; MOX SENSORS; PHASE; CAVITANDS; FABRICATION; LEVEL; PRECONCENTRATOR;
D O I
10.1016/j.snb.2009.06.021
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Micromachined gas-chromatographic (CC) components in combination with high sensitivity MOX detectors and novel pre-concentration materials were utilized to develop a miniaturized, portable, stand-alone sub-ppb level monitoring system for aromatic volatile organic compounds (VOC). Using metal oxide semiconductor (MOX) gas sensors as detectors in a CC system, the intrinsic analytic selectivity of CC is exploited in a simplified architecture with on-board generated carrier gas. The work reported here includes the study of innovative pre-concentration materials, the micromachining of CC components and devices, the fabrication and characterization of complete system prototypes, and the development of application-specific control electronics. The results of both laboratory trials and successful real-world cross-validation with a reference analyzer are described. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:322 / 328
页数:7
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