Fabrication of miniaturised Si-based electrocatalytic membranes

The increasing interest for light and movable electronic systems, cell phones and small digital devices, drives the technological research toward integrated regenerating power sources with small dimensions and great autonomy. Conventional batteries are already unable to deliver power in more and more shrunk volumes maintaining the requirements of long duration and light weight. A possible solution to overcome these limits is the use of miniaturised fuel cell. The fuel cell offers a greater gravimetric energy density compared to conventional batteries. The micromachining technology of silicon is an important tool to reduce the fuel cell structure to micrometer sizes. The use of silicon also gives the opportunity to integrate the power source and the electronic circuits controlling the fuel cell on the same structure. This paper reports preliminary results concerning the micromachining procedure for fabricating a Si-based electrocatalytic membrane for miniaturised Si-based proton exchange membrane fuel cells (PEMFC). (C) 2002 Elsevier Science B.V. All rights reserved.